TY  - RPRT
TI  - Improving magnetic-field resilience of NbTiN planar resonators using a hard-mask fabrication technique
AU  - Arne Bahr
AU  - Matteo Boselli
AU  - Benjamin Huard
AU  - Audrey Bienfait
PY  - 2023
DO  - 10.1063/5.0191393
UR  - https://arxiv.org/abs/2312.13703
ID  - 2312.13703
ER  -