@misc{indiciaef31f13962b53, title = {Scalable nanoimprint manufacturing of multi-layer hybrid metasurface device}, author = {Shinhyuk Choi and Jiawei Zuo and Nabasindhu Das Yu Yao and Chao Wang}, year = {2023}, url = {https://arxiv.org/abs/2312.14297}, note = {Source identifier: 2312.14297} }