TY  - RPRT
TI  - Scalable nanoimprint manufacturing of multi-layer hybrid metasurface device
AU  - Shinhyuk Choi
AU  - Jiawei Zuo
AU  - Nabasindhu Das Yu Yao
AU  - Chao Wang
PY  - 2023
UR  - https://arxiv.org/abs/2312.14297
ID  - 2312.14297
ER  -