TY  - RPRT
TI  - Novel End-to-End Production-Ready Machine Learning Flow for Nanolithography Modeling and Correction
AU  - Mohamed S. E. Habib
AU  - Hossam A. H. Fahmy
AU  - Mohamed F. Abu-ElYazeed
PY  - 2024
DO  - 10.54364/aaiml.2024.41110
UR  - https://arxiv.org/abs/2401.02536
ID  - 2401.02536
ER  -