@misc{indiciae7d1500fae8d6,
  title = {Etching of elemental layers in oxide molecular beam epitaxy by O2-assisted formation and evaporation of their volatile suboxide: The examples of Ga and Ge},
  author = {Wenshan Chen and Kingsley Egbo and Huaide Zhang and Andrea Ardenghi and Oliver Bierwagen},
  year = {2024},
  doi = {10.1116/6.0003453},
  url = {https://arxiv.org/abs/2401.07374},
  note = {Source identifier: 2401.07374}
}