TY  - RPRT
TI  - Etching of elemental layers in oxide molecular beam epitaxy by O2-assisted formation and evaporation of their volatile suboxide: The examples of Ga and Ge
AU  - Wenshan Chen
AU  - Kingsley Egbo
AU  - Huaide Zhang
AU  - Andrea Ardenghi
AU  - Oliver Bierwagen
PY  - 2024
DO  - 10.1116/6.0003453
UR  - https://arxiv.org/abs/2401.07374
ID  - 2401.07374
ER  -