@misc{indiciaeed0de87d20e6,
  title = {Grayscale Electron Beam Lithography Direct Patterned Antimony Sulfide},
  author = {Wei Wang and Uwe Hübner and Tao Chen and Anne Gärtner and Joseph Köbel and Franka Jahn and Henrik Schneidwind and Andrea Dellith and Jan Dellith and Torsten Wieduwilt and Matthias Zeisberger and Tanveer Ahmed Shaik and Astrid Bingel and Markus A Schmidt and Jer-Shing Huang and Volker Deckert},
  year = {2024},
  url = {https://arxiv.org/abs/2401.13427},
  note = {Source identifier: 2401.13427}
}