@misc{indiciaee2719ddd9ba9,
  title = {Optimization of scandium oxide growth by high pressure sputtering on silicon},
  author = {Pedro Carlos Feijoo and María Ángela Pampillón and Enrique San Andrés and María Luisa Lucía},
  year = {2024},
  doi = {10.1016/j.tsf.2012.11.008},
  url = {https://arxiv.org/abs/2401.16489},
  note = {Source identifier: 2401.16489}
}