TY  - RPRT
TI  - Optimization of scandium oxide growth by high pressure sputtering on silicon
AU  - Pedro Carlos Feijoo
AU  - María Ángela Pampillón
AU  - Enrique San Andrés
AU  - María Luisa Lucía
PY  - 2024
DO  - 10.1016/j.tsf.2012.11.008
UR  - https://arxiv.org/abs/2401.16489
ID  - 2401.16489
ER  -