@misc{indiciaed38182a96203, title = {Optimization of gadolinium oxide growth deposited on Si by high pressure sputtering}, author = {Pedro Carlos Feijoo and María Ángela Pampillón and Enrique San Andrés}, year = {2024}, doi = {10.1116/1.4766184}, url = {https://arxiv.org/abs/2401.16499}, note = {Source identifier: 2401.16499} }