TY  - RPRT
TI  - Optimization of gadolinium oxide growth deposited on Si by high pressure sputtering
AU  - Pedro Carlos Feijoo
AU  - María Ángela Pampillón
AU  - Enrique San Andrés
PY  - 2024
DO  - 10.1116/1.4766184
UR  - https://arxiv.org/abs/2401.16499
ID  - 2401.16499
ER  -