@misc{indiciae10b42304355b,
  title = {High Pressure Sputtering For Kigh-k Dielectric Deposition. Is It Worth Trying?},
  author = {Enrique San Andrés and Pedro Carlos Feijoo and María Ángela Pampillón and María Luisa Lucía and Álvaro del Prado},
  year = {2024},
  doi = {10.1149/06102.0027ecst},
  url = {https://arxiv.org/abs/2401.17331},
  note = {Source identifier: 2401.17331}
}