TY  - RPRT
TI  - High Pressure Sputtering For Kigh-k Dielectric Deposition. Is It Worth Trying?
AU  - Enrique San Andrés
AU  - Pedro Carlos Feijoo
AU  - María Ángela Pampillón
AU  - María Luisa Lucía
AU  - Álvaro del Prado
PY  - 2024
DO  - 10.1149/06102.0027ecst
UR  - https://arxiv.org/abs/2401.17331
ID  - 2401.17331
ER  -