@misc{indiciae833ab27a5846, title = {High-k gadolinium scandate on Si obtained by high pressure sputtering from metal targets and in-situ plasma oxidation}, author = {María Ángela Pampillón and Enrique San Andrés and Pedro Carlos Feijoo and José Luis G. Fierro}, year = {2024}, doi = {10.1088/1361-6641/aa58cc}, url = {https://arxiv.org/abs/2401.17332}, note = {Source identifier: 2401.17332} }