TY  - RPRT
TI  - High-k gadolinium scandate on Si obtained by high pressure sputtering from metal targets and in-situ plasma oxidation
AU  - María Ángela Pampillón
AU  - Enrique San Andrés
AU  - Pedro Carlos Feijoo
AU  - José Luis G. Fierro
PY  - 2024
DO  - 10.1088/1361-6641/aa58cc
UR  - https://arxiv.org/abs/2401.17332
ID  - 2401.17332
ER  -