@misc{indiciaed03bd8dcaf25,
  title = {Scavenging effect on plasma oxidized Gd\$\_2\$O\$\_3\$ grown by high pressure sputtering on Si and InP substrates},
  author = {María Ángela Pampillón and Pedro Carlos Feijoo and Enrique San Andrés and Héctor García and Helena Castán and Salvador Dueñas},
  year = {2024},
  doi = {10.1088/0268-1242/30/3/035023},
  url = {https://arxiv.org/abs/2401.17333},
  note = {Source identifier: 2401.17333}
}