TY  - RPRT
TI  - Scavenging effect on plasma oxidized Gd$_2$O$_3$ grown by high pressure sputtering on Si and InP substrates
AU  - María Ángela Pampillón
AU  - Pedro Carlos Feijoo
AU  - Enrique San Andrés
AU  - Héctor García
AU  - Helena Castán
AU  - Salvador Dueñas
PY  - 2024
DO  - 10.1088/0268-1242/30/3/035023
UR  - https://arxiv.org/abs/2401.17333
ID  - 2401.17333
ER  -