@misc{indiciae8c7789ca80ee,
  title = {In situ GaN decomposition analysis by quadrupole mass spectrometry and reflection high-energy electron diffraction},
  author = {S. Fernández-Garrido and G. Koblmüller and E. Calleja and J. S. Speck},
  year = {2024},
  doi = {10.1063/1.2968442},
  url = {https://arxiv.org/abs/2401.17339},
  note = {Source identifier: 2401.17339}
}