@misc{indiciae4053676210ab,
  title = {Tensor-based process control and monitoring for semiconductor manufacturing with unstable disturbances},
  author = {Yanrong Li and Juan Du and Fugee Tsung and Wei Jiang},
  year = {2024},
  url = {https://arxiv.org/abs/2401.17573},
  note = {Source identifier: 2401.17573}
}