TY  - RPRT
TI  - Tensor-based process control and monitoring for semiconductor manufacturing with unstable disturbances
AU  - Yanrong Li
AU  - Juan Du
AU  - Fugee Tsung
AU  - Wei Jiang
PY  - 2024
UR  - https://arxiv.org/abs/2401.17573
ID  - 2401.17573
ER  -