@misc{indiciae857593e2d227, title = {Time-Dependent Dielectric Breakdown on Subnanometer EOT nMOS FinFETs}, author = {Pedro C. Feijoo and Thomas Kauerauf and María Toledano-Luque and Mitsuhiro Togo and Enrique San Andrés and Guido Groeseneken}, year = {2024}, doi = {10.1109/tdmr.2011.2180387}, url = {https://arxiv.org/abs/2402.00886}, note = {Source identifier: 2402.00886} }