TY - RPRT TI - Gadolinium scandate by high-pressure sputtering for future generations of high-k dielectrics AU - Pedro Carlos Feijoo AU - María Ángela Pampillón AU - Enrique San Andrés AU - José Luis G. Fierro PY - 2024 DO - 10.1088/0268-1242/28/8/085004 UR - https://arxiv.org/abs/2402.00887 ID - 2402.00887 ER -