@misc{indiciae2b852e0232c4, title = {Nitrogen-polar growth of AlN on vicinal (0001) sapphire by MOVPE}, author = {Pietro Pampili and Markus Pristovsek}, year = {2024}, doi = {10.1063/5.0202746}, url = {https://arxiv.org/abs/2402.03180}, note = {Source identifier: 2402.03180} }