TY  - RPRT
TI  - Nitrogen-polar growth of AlN on vicinal (0001) sapphire by MOVPE
AU  - Pietro Pampili
AU  - Markus Pristovsek
PY  - 2024
DO  - 10.1063/5.0202746
UR  - https://arxiv.org/abs/2402.03180
ID  - 2402.03180
ER  -