@misc{indiciaec0143142c3e4,
  title = {On the influence of annealing on the compositional and crystallographic properties of sputtered Li-Al-O thin films},
  author = {Florian Lourens and Detlef Rogalla and Ellen Suhr and Alfred Ludwig},
  year = {2024},
  doi = {10.1002/adem.202400602},
  url = {https://arxiv.org/abs/2402.06553},
  note = {Source identifier: 2402.06553}
}