TY  - RPRT
TI  - On the influence of annealing on the compositional and crystallographic properties of sputtered Li-Al-O thin films
AU  - Florian Lourens
AU  - Detlef Rogalla
AU  - Ellen Suhr
AU  - Alfred Ludwig
PY  - 2024
DO  - 10.1002/adem.202400602
UR  - https://arxiv.org/abs/2402.06553
ID  - 2402.06553
ER  -