@misc{indiciae845f5f6a932a, title = {Numerical investigation of vacuum ultra-violet emission in Ar/O\$\_2\$ inductively coupled plasmas}, author = {Michel Osca Engelbrecht and Jonathan Jenderny and Henrik Hylla and Dominik Filla and Peter Awakowicz and Ihor Korolov and Christopher P. Ridgers and Andrew R. Gibson}, year = {2024}, url = {https://arxiv.org/abs/2402.08092}, note = {Source identifier: 2402.08092} }