@misc{indiciaec4a1dcbf6149,
  title = {Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics},
  author = {Anastasiia Ciers and Alexander Jung and Joachim Ciers and Laurentius Radit Nindito and Hannes Pfeifer and Armin Dadgar and Andre Strittmatter and Witlef Wieczorek},
  year = {2024},
  doi = {10.1002/adma.202403155},
  url = {https://arxiv.org/abs/2402.12196},
  note = {Source identifier: 2402.12196}
}