TY  - RPRT
TI  - Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics
AU  - Anastasiia Ciers
AU  - Alexander Jung
AU  - Joachim Ciers
AU  - Laurentius Radit Nindito
AU  - Hannes Pfeifer
AU  - Armin Dadgar
AU  - Andre Strittmatter
AU  - Witlef Wieczorek
PY  - 2024
DO  - 10.1002/adma.202403155
UR  - https://arxiv.org/abs/2402.12196
ID  - 2402.12196
ER  -