@misc{indiciae51a57557d55f,
  title = {Combining unsupervised and supervised learning in microscopy enables defect analysis of a full 4H-SiC wafer},
  author = {Binh Duong Nguyen and Johannes Steiner and Peter Wellmann and Stefan Sandfeld},
  year = {2024},
  url = {https://arxiv.org/abs/2402.13353},
  note = {Source identifier: 2402.13353}
}