TY  - RPRT
TI  - Combining unsupervised and supervised learning in microscopy enables defect analysis of a full 4H-SiC wafer
AU  - Binh Duong Nguyen
AU  - Johannes Steiner
AU  - Peter Wellmann
AU  - Stefan Sandfeld
PY  - 2024
UR  - https://arxiv.org/abs/2402.13353
ID  - 2402.13353
ER  -