@misc{indiciae118f5afe05ae,
  title = {Partial State-Feedback Reduced-Order Switching Predictive Models for Next-Generation Optical Lithography Systems},
  author = {Raaja Ganapathy Subramanian and Barry Moest and Bart Paarhuis},
  year = {2025},
  url = {https://arxiv.org/abs/2402.13928},
  note = {Source identifier: 2402.13928}
}