@misc{indiciaefda244b7aea2,
  title = {Photolithography Control System : A Case Study For Cyber-Physical System},
  author = {Youbao Zhang and Huijie Huang},
  year = {2024},
  url = {https://arxiv.org/abs/2402.15693},
  note = {Source identifier: 2402.15693}
}