@misc{indiciae7732fe74c680,
  title = {Extreme ultraviolet lithography reaches 5 nm resolution},
  author = {Iason Giannopoulos and Iacopo Mochi and Michaela Vockenhuber and Yasin Ekinci and Dimitrios Kazazis},
  year = {2024},
  url = {https://arxiv.org/abs/2402.18234},
  note = {Source identifier: 2402.18234}
}