TY  - RPRT
TI  - Extreme ultraviolet lithography reaches 5 nm resolution
AU  - Iason Giannopoulos
AU  - Iacopo Mochi
AU  - Michaela Vockenhuber
AU  - Yasin Ekinci
AU  - Dimitrios Kazazis
PY  - 2024
UR  - https://arxiv.org/abs/2402.18234
ID  - 2402.18234
ER  -