@misc{indiciaed9d373875ed2,
  title = {Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging},
  author = {Lert Chayanun and Janka Biznárová and Lunjie Zeng and Per Malmberg and Andreas Nylander and Amr Osman and Marcus Rommel and Pui Lam Tam and Eva Olsson and August Yurgens and Jonas Bylander and Anita Fadavi Roudsari},
  year = {2024},
  doi = {10.1063/5.0208140},
  url = {https://arxiv.org/abs/2403.00723},
  note = {Source identifier: 2403.00723}
}