TY  - RPRT
TI  - Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging
AU  - Lert Chayanun
AU  - Janka Biznárová
AU  - Lunjie Zeng
AU  - Per Malmberg
AU  - Andreas Nylander
AU  - Amr Osman
AU  - Marcus Rommel
AU  - Pui Lam Tam
AU  - Eva Olsson
AU  - August Yurgens
AU  - Jonas Bylander
AU  - Anita Fadavi Roudsari
PY  - 2024
DO  - 10.1063/5.0208140
UR  - https://arxiv.org/abs/2403.00723
ID  - 2403.00723
ER  -