@misc{indiciaea576f4346d91,
  title = {Beyond structural stabilization of highly-textured AlN thin film: the role of chemical effects},
  author = {O. V. Pshyk and J. Patidar and S. Siol},
  year = {2024},
  doi = {10.1002/admi.202400235},
  url = {https://arxiv.org/abs/2403.10385},
  note = {Source identifier: 2403.10385}
}