TY  - RPRT
TI  - Beyond structural stabilization of highly-textured AlN thin film: the role of chemical effects
AU  - O. V. Pshyk
AU  - J. Patidar
AU  - S. Siol
PY  - 2024
DO  - 10.1002/admi.202400235
UR  - https://arxiv.org/abs/2403.10385
ID  - 2403.10385
ER  -