@misc{indiciae46d28fd99d4b, title = {Synchronized Opto-Electro-Mechanical Measurements for Energy Loss Estimation in Thin-Film-Piezoelectric-on-Substrate MEMS/NEMS Devices}, author = {Vishnu Kumar and Sudhanshu Tiwari and Gayathri Pillai and Rudra Pratap and Saurabh Chandorkar}, year = {2024}, doi = {10.1109/jmems.2024.3465507}, url = {https://arxiv.org/abs/2403.10845}, note = {Source identifier: 2403.10845} }