TY  - RPRT
TI  - Synchronized Opto-Electro-Mechanical Measurements for Energy Loss Estimation in Thin-Film-Piezoelectric-on-Substrate MEMS/NEMS Devices
AU  - Vishnu Kumar
AU  - Sudhanshu Tiwari
AU  - Gayathri Pillai
AU  - Rudra Pratap
AU  - Saurabh Chandorkar
PY  - 2024
DO  - 10.1109/jmems.2024.3465507
UR  - https://arxiv.org/abs/2403.10845
ID  - 2403.10845
ER  -