@misc{indiciaec3666f6b01ef, title = {Multi-State, Ultra-thin, BEOL-Compatible AlScN Ferroelectric Diodes}, author = {Kwan-Ho Kim and Zirun Han and Yinuo Zhang and Pariasadat Musavigharavi and Jeffrey Zheng and Dhiren K. Pradhan and Eric A. Stach and Roy H. Olsson III and Deep Jariwala}, year = {2024}, url = {https://arxiv.org/abs/2403.12361}, note = {Source identifier: 2403.12361} }