@misc{indiciaec21f552e92b9, title = {Explainable AutoML (xAutoML) with adaptive modeling for yield enhancement in semiconductor smart manufacturing}, author = {Weihong Zhai and Xiupeng Shi and Yiik Diew Wong and Qing Han and Lisheng Chen}, year = {2024}, url = {https://arxiv.org/abs/2403.12381}, note = {Source identifier: 2403.12381} }