TY  - RPRT
TI  - Explainable AutoML (xAutoML) with adaptive modeling for yield enhancement in semiconductor smart manufacturing
AU  - Weihong Zhai
AU  - Xiupeng Shi
AU  - Yiik Diew Wong
AU  - Qing Han
AU  - Lisheng Chen
PY  - 2024
UR  - https://arxiv.org/abs/2403.12381
ID  - 2403.12381
ER  -