@misc{indiciae385b5cc71b5b,
  title = {CMOS-compatible photonic integrated circuits on thin-film ScAlN},
  author = {Sihao Wang and Veerendra Dhyani and Sakthi Sanjeev Mohanraj and Xiaodong Shi and Binni Varghese and Wing Wai Chung and Ding Huang and Zhi Shiuh Lim and Qibin Zeng and Huajun Liu and Xianshu Luo and Victor Leong and Nanxi Li and Di Zhu},
  year = {2024},
  doi = {10.1063/5.0208517},
  url = {https://arxiv.org/abs/2403.14212},
  note = {Source identifier: 2403.14212}
}