@misc{indiciae91fccf24d60a, title = {Bessel-beam direct-write of the etch-mask in a nano-film of alumina for high-efficiency Si solar cells}, author = {Tomas Katkus and Soon Hock Ng and Haoran Mu and Nguyen Hoai An Le and Dominyka Stonyte and Zahra Khajehsaeidimahabadi and Gediminas Seniutinas and Justas Baltrukonis and Orestas Ulcinas and Mindaugas Mikutis and Vytautas Sabonis and Yoshiaki Nishijima and Michael Rienacker and Jan Krugener and Robby Peibst and Sajeev John and Saulius Juodkazis}, year = {2024}, url = {https://arxiv.org/abs/2403.14237}, note = {Source identifier: 2403.14237} }