@misc{indiciaed9059abc4890,
  title = {Surface figure correction using differential deposition of WSi\$\_2\$},
  author = {Ch. Morawe and P. Bras and S. Labouré and F. Perrin and A. Vivo},
  year = {2024},
  doi = {10.1117/12.2676633},
  url = {https://arxiv.org/abs/2403.17498},
  note = {Source identifier: 2403.17498}
}