@misc{indiciaeede18ad9d7e5, title = {Optical tools for laser machining along six orders of magnitude}, author = {Julian Hellstern and Christoph Tillkorn and Tim Hieronymus and Myriam Kaiser and Torsten Beck and Daniel Flamm}, year = {2024}, doi = {10.1117/12.3002211}, url = {https://arxiv.org/abs/2403.19250}, note = {Source identifier: 2403.19250} }