TY  - RPRT
TI  - Optical tools for laser machining along six orders of magnitude
AU  - Julian Hellstern
AU  - Christoph Tillkorn
AU  - Tim Hieronymus
AU  - Myriam Kaiser
AU  - Torsten Beck
AU  - Daniel Flamm
PY  - 2024
DO  - 10.1117/12.3002211
UR  - https://arxiv.org/abs/2403.19250
ID  - 2403.19250
ER  -