@misc{indiciae32203b608817,
  title = {Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry},
  author = {Michael Tanksalvala and Christina L. Porter and Yuka Esashi and Bin Wang and Nicholas W. Jenkins and Zhe Zhang and Galen P. Miley and Joshua L. Knobloch and Brendan McBennett and Naoto Horiguchi and Sadegh Yazdi and Jihan Zhou and Matthew N. Jacobs and Charles S. Bevis and Robert M. Karl Jr. and Peter Johnsen and David Ren and Laura Waller and Daniel E. Adams and Seth L. Cousin and Chen-Ting Liao and Jianwei Miao and Michael Gerrity and Henry C. Kapteyn and Margaret M. Murnane},
  year = {2024},
  doi = {10.1126/sciadv.abd9667},
  url = {https://arxiv.org/abs/2404.02170},
  note = {Source identifier: 2404.02170}
}